Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass



This invention was made with Government support under DE-EE0003331 awarded by DOE. The Government has certain rights in this invention.

FIG. 1 is a cleaning plate for inducing turbulent flow of a processing chamber cleaning gas.

FIG. 2 is a top plan view of the cleaning plate of FIG. 1.

FIG. 3 is a bottom isometric view of the cleaning plate of FIG. 1.

FIG. 4 is a bottom plan view of the cleaning plate of FIG. 1.

FIG. 5 is a side perspective view of the cleaning plate of 1; and,

FIG. 6 is an enlarged partial view of FIG. 3.

The broken lines in the figures form no part of the claimed design. 

The ornamental design for a cleaning plate for inducing turbulent flow of a processing chamber cleaning glass, as shown. 